Method and system for tilting a substrate during gas cluster ion beam processing

ABSTRACT

A method and system for treating a non-planar structure is described. The method includes forming a non-planar structure on a substrate. Additionally, the method includes generating a gas cluster ion beam (GCIB) formed from a material source for treatment of the non-planar structure, tilting the substrate relative to the GCIB, and irradiating the non-planar structure with the GCIB. The system includes a substrate tilt actuator coupled to a substrate holder and configured to tilt the substrate holder relative to a GCIB.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is related to co-pending U.S. patent application Ser.No. 12/575,806 (Attorney Docket No. EP-165), entitled GAS CLUSTER IONBEAM PROCESSING METHOD FOR PREPARING AN ISOLATION LAYER IN NON-PLANARGATE STRUCTURES, filed on even date herewith, and co-pending U.S. patentapplication Ser. No. 12/575,887 (Attorney Docket No. EP-176), entitledMETHOD FOR TREATING NON-PLANAR STRUCTURES USING GAS CLUSTER ION BEAMPROCESSING, filed on even date herewith. The entire contents of theseapplications are herein incorporated by reference in their entirety.

BACKGROUND OF THE INVENTION

1. Field of Invention

The invention relates to a method and system for tilting a substratewhen treating non-planar structures using a gas cluster ion beam (GCIB).In particular, the invention relates to a method and system for tiltinga substrate when treating non-planar gate structures using a GCIB.

2. Description of Related Art

Gas-cluster ion beams (GCIB's) are used for etching, cleaning,smoothing, and forming thin films. For purposes of this discussion, gasclusters are nano-sized aggregates of materials that are gaseous underconditions of standard temperature and pressure. Such gas clusters mayconsist of aggregates including a few to several thousand molecules, ormore, that are loosely bound together. The gas clusters can be ionizedby electron bombardment, which permits the gas clusters to be formedinto directed beams of controllable energy. Such cluster ions eachtypically carry positive charges given by the product of the magnitudeof the electron charge and an integer greater than or equal to one thatrepresents the charge state of the cluster ion.

The larger sized cluster ions are often the most useful because of theirability to carry substantial energy per cluster ion, while yet havingonly modest energy per individual molecule. The ion clustersdisintegrate on impact with the substrate. Each individual molecule in aparticular disintegrated ion cluster carries only a small fraction ofthe total cluster energy. Consequently, the impact effects of large ionclusters are substantial, but are limited to a very shallow surfaceregion. This makes gas cluster ions effective for a variety of surfacemodification processes, but without the tendency to produce deepersub-surface damage that is characteristic of conventional ion beamprocessing.

Conventional cluster ion sources produce cluster ions having a wide sizedistribution scaling with the number of molecules in each cluster thatmay reach several thousand molecules. Clusters of atoms can be formed bythe condensation of individual gas atoms (or molecules) during theadiabatic expansion of high pressure gas from a nozzle into a vacuum. Askimmer with a small aperture strips divergent streams from the core ofthis expanding gas flow to produce a collimated beam of clusters.Neutral clusters of various sizes are produced and held together by weakinter-atomic forces known as Van der Waals forces. This method has beenused to produce beams of clusters from a variety of gases, such ashelium, neon, argon, krypton, xenon, nitrogen, oxygen, carbon dioxide,sulfur hexafluoride, nitric oxide, and nitrous oxide, and mixtures ofthese gases.

Several emerging applications for GCIB processing of substrates on anindustrial scale are in the semiconductor field. Although GCIBprocessing of a substrate is performed in a wide variety of processes,many processes fail to provide adequate control of critical propertiesand/or dimensions of the surface, structure, and/or film subject to GCIBtreatment.

SUMMARY OF THE INVENTION

The invention relates to a method and system for tilting a substratewhen treating non-planar structures using a gas cluster ion beam (GCIB).In particular, the invention relates to a method and system for tiltinga substrate when treating non-planar gate structures using a GCIB.

Further, the invention relates to treating a sidewall of a fin using aGCIB. As an example, one or more GCIB treatment processes may beutilized to form a screening layer on a top surface of the fin and/ordope a sidewall of the fin. As another example, the fin may be utilizedas a source or drain in a non-planar or three-dimensional (3D) gatestructure.

According to one embodiment, a method for preparing a non-planarstructure is described. The method comprises forming a non-planarstructure on a substrate. Additionally, the method comprises generatinga GCIB formed from a material source for treatment of the non-planarstructure, and tilting the substrate relative to the GCIB. The methodfurther comprises irradiating the non-planar structure with the GCIB.

According to another embodiment, a GCIB processing system is described.The GCIB processing system comprises a vacuum vessel, a GCIB sourcedisposed in the vacuum vessel and configured to produce a GCIB, and asubstrate holder configured to support the substrate inside the vacuumvessel for treatment by the GCIB. The GCIB processing system furthercomprises a scan actuator coupled to the substrate holder and configuredto scan the substrate holder through the GCIB, a substrate tilt actuatorcoupled to the substrate holder and configured to tilt the substrateholder relative to the GCIB, and a control system coupled to the scanactuator and the substrate tilt actuator, and configured to programmablyoperate the scan actuator and the substrate tilt actuator to scan andtilt, with programmable velocity, any portion of the substrate throughthe projected impact region for GCIB processing by the GCIB.

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings:

FIG. 1 is a schematic oblique view of a three-dimensional (3D)structure;

FIG. 2 is a flow chart illustrating a method of forming material on astructure according to an embodiment;

FIG. 3A provides a schematic cross-sectional view of a structureaccording to an embodiment;

FIG. 3B provides an enlarged view of the encircled portion 3B of thestructure depicted in FIG. 3A;

FIG. 3C provides a schematic graphical illustration of an angulardistribution function for a GCIB;

FIG. 4 is a flow chart illustrating a method of doping a structureaccording to another embodiment;

FIG. 5A provides a schematic cross-sectional view of a structureaccording to another embodiment;

FIG. 5B provides an enlarged view of the encircled portion 5B of thestructure depicted in FIG. 5A;

FIG. 6 is a flow chart illustrating a method of preparing a structureaccording to yet another embodiment;

FIG. 7 is a schematic illustration of a GCIB processing system;

FIG. 8 is another schematic illustration of a GCIB processing system;

FIG. 9 is yet another schematic illustration of a GCIB processingsystem; and

FIG. 10 is a cross-sectional schematic illustration of an ionizationsource for a GCIB processing system.

DETAILED DESCRIPTION OF SEVERAL EMBODIMENTS

A method and system for treating a non-planar structure on a substrateusing a gas cluster ion beam (GCIB) is disclosed in various embodiments.However, one skilled in the relevant art will recognize that the variousembodiments may be practiced without one or more of the specificdetails, or with other replacement and/or additional methods, materials,or components. In other instances, well-known structures, materials, oroperations are not shown or described in detail to avoid obscuringaspects of various embodiments of the invention. Similarly, for purposesof explanation, specific numbers, materials, and configurations are setforth in order to provide a thorough understanding of the invention.Nevertheless, the invention may be practiced without specific details.Furthermore, it is understood that the various embodiments shown in thefigures are illustrative representations and are not necessarily drawnto scale.

Reference throughout this specification to “one embodiment” or “anembodiment” means that a particular feature, structure, material, orcharacteristic described in connection with the embodiment is includedin at least one embodiment of the invention, but do not denote that theyare present in every embodiment. Thus, the appearances of the phrases“in one embodiment” or “in an embodiment” in various places throughoutthis specification are not necessarily referring to the same embodimentof the invention. Furthermore, the particular features, structures,materials, or characteristics may be combined in any suitable manner inone or more embodiments. Various additional layers and/or structures maybe included and/or described features may be omitted in otherembodiments.

As described above, in material processing such as semiconductormaterial processing, there is a general need for treating varioussurfaces of a substrate, including doping these surfaces, modifying thematerial properties of these surfaces, forming thin films of material onthese surfaces, etching these surfaces, to name a few, using one or moreGCIB treatments. In particular, there is a need to perform suchtreatments of these surfaces of the substrate, while providing adequatecontrol of critical properties and/or dimensions of the surface,structure, and/or film subject to the one or more GCIB treatments.

Furthermore, as described above, there is a need for selectivelygrowing, depositing, etching, modifying, and/or doping material on onlychosen surfaces of a substrate using a GCIB. By adjusting properties ofthe GCIB and/or adjusting the orientation of the substrate relative tothe GCIB, the treatment of the substrate may proceed at different rateson select surfaces. For example, treatment may proceed on some surfaces,while they are substantially avoided or reduced on other surfaces.

“Substrate” as used herein generically refers to the object beingprocessed in accordance with the invention. The substrate may includeany material portion or structure of a device, particularly asemiconductor or other electronics device, and may, for example, be abase substrate structure, such as a semiconductor wafer or a layer on oroverlying a base substrate structure such as a thin film. Thus,substrate is not intended to be limited to any particular basestructure, underlying layer or overlying layer, patterned orunpatterned, but rather, is contemplated to include any such layer orbase structure, and any combination of layers and/or base structures.The description below may reference particular types of substrates, butthis is for illustrative purposes only and not limitation.

Herein, the term “to form” (or “forming”, or “formation”) is used tobroadly represent the preparation of a thin film of material on one ormore surfaces of a substrate. Additionally herein, “growth” and“deposition” are defined and used in a manner to distinguish from oneanother. During growth, a thin film is formed on a substrate, whereinonly a fraction of the atomic constituents of the thin film areintroduced in the GCIB and the remaining fraction is provided by thesubstrate upon which the thin film is grown. For example, when growingSiO_(x) on a substrate, the substrate may comprise a silicon surface,which is irradiated by a GCIB containing oxygen. The grown layer is thusa reaction product of the silicon from the silicon surface and theoxygen from the GCIB. To the contrary, during deposition, a thin film isformed on a substrate, wherein substantially all of the atomicconstituents of the thin film are introduced in the GCIB. For example,when depositing SiC_(x), the substrate is irradiated by a GCIBcontaining both silicon and carbon.

Referring now to FIG. 1, a perspective view of a non-planar, 3Dstructure is provided. The 3D structure may comprise a 3D gate structure1, such as a fin FET (field-effect transistor) or multi-gate fin FET.For example, the 3D gate structure 1 illustrated in FIG. 1 includes adual-gate fin FET. The 3D gate structure 1 comprises a first fin 10having a first source region 12 and a first drain region 14, and asecond fin 20 having a second source region 22 and a second drain region24. The first fin 10 and the second fin 20 are formed on an insulationlayer 5 above substrate 2. The 3D gate structure 1 further comprises agate 30, and a gate insulation layer 32 disposed between the gate 30 andthe first fin 10 and the second fin 20.

When preparing the first and second source regions 12 and 22, and thefirst and second drain regions 14 and 24, the side walls 10 a, 20 a ofthe first fin 10 and the second fin 20 are doped. To avoid or reduce theintroduction of dopant to the top surfaces 10 b, 20 b of the first andsecond fins 10 and 20, a screening layer (not shown) is formed on thetop surfaces 10 b, 20 b of the first and second fins 10 and 20 toprotect the top surfaces 10 b, 20 b when introducing the dopant into thesidewalls 10 a, 20 a. Therefore, during fabrication of a 3D structure,manufacturing techniques are sought that form material on and/orintroduce material to only select surfaces of the 3D structure.

Referring now to FIGS. 2, 3A, and 3B, a method for forming material on astructure is described according to an embodiment. The method isillustrated by a flow chart 400 beginning in 410 with forming astructure, such as a non-planar (or 3D) structure, on a substrate,wherein the structure has a plurality of surfaces including one or morefirst surfaces lying substantially parallel to a first plane parallelwith the substrate, and one or more second surfaces lying substantiallyperpendicular to said first plane. While the embodiments described andshown in detail herein illustrate the invention by specificallyreferencing parallel and perpendicular surfaces of the fins of anon-planar structure, it may be readily understood that the varioustypes of non-planar structures include a plurality of both parallel andperpendicular surfaces on other substructures of the overall non-planarstructure in addition to the fin substructure such that the embodimentsof the invention may further apply to these other surfaces. Thesubstrate can include a conductive material, a non-conductive material,or a semi-conductive material, or a combination of two or more materialsthereof. Additionally, the substrate may include one or more materialstructures formed thereon, or the substrate may be a blanket substratefree of material structures. For example, the structure may comprise amulti-gate field-effect transistor (MuFET), or a fin field-effecttransistor (FinFET). Additionally, for example, the structure maycomprise a via, a contact, a trench, a film stack, etc.

As shown in FIGS. 3A and 3B, a schematic cross-sectional view of astructure 500 is illustrated according to an embodiment. The structure500 comprises one or more fins 510, each having a base 514 at a basesurface of a substrate 505, a top surface 512, two sidewalls 516 (thatmay be substantially parallel with one another) extending between thebase 514 and the top surface 512, and at least one end wall (not shown)extending between the base 514 and the top surface 516 and extendingbetween the two sidewalls 516. At least one of the first surfaces 550,which include the top surface 512 of each fin 510 and the base surfaceat the substrate 505, is oriented substantially parallel with a firstplane 555 (i.e., the plane within which substrate 505 lies). As shown inFIG. 3A, the first plane 555 may be substantially perpendicular to aGCIB 520. In one embodiment, each of the first surfaces 550 is orientedsubstantially parallel with the first plane 555. Further, at least oneof the second surfaces 552, which include sidewalls 516, is orientedsubstantially perpendicular with the first plane 555. In one embodiment,each of the second surfaces 552 is oriented substantially perpendicularwith the first plane 555.

As an example, one or more second surfaces 552 that are substantiallyperpendicular to the first plane 555 may comprise an angular deviationof up to about 25 degrees from a surface normal of the first plane 555.Alternatively, one or more second surfaces 552 that are substantiallyperpendicular to the first plane 555 may comprise an angular deviationof up to about 20 degrees from a surface normal of the first plane 555.Alternatively, one or more second surfaces 552 that are substantiallyperpendicular to the first plane 555 may comprise an angular deviationof up to about 10 degrees from a surface normal of the first plane 555.Alternatively yet, one or more second surfaces 552 that aresubstantially perpendicular to the first plane 555 may comprise anangular deviation of up to about 5 degrees from a surface normal of thefirst plane 555.

Consequently, one or more first surfaces 550 that are substantiallyparallel with the first plane 555 may comprise an angular deviationgreater than about 75 degrees from a surface normal of the first plane555. Alternatively, one or more first surfaces 550 that aresubstantially parallel with the first plane 555 may comprise an angulardeviation greater than about 80 degrees from a surface normal of thefirst plane 555. Alternatively, one or more first surfaces 550 that aresubstantially parallel with the first plane 555 may comprise an angulardeviation greater than about 85 degrees from a surface normal of thefirst plane 555. Alternatively yet, one or more first surfaces 550 thatare substantially parallel with the first plane 555 may comprise anangular deviation greater than about 90 degrees from a surface normal ofthe first plane 555.

Referring again to FIG. 2, in 420, a GCIB formed or generated from amaterial source for a thin film is directed toward the substrate with adirection of incidence relative to the substrate. The deviation of thedirection of incidence of the GCIB may vary plus or minus about 1 to 3degrees due to variations in the GCIB processing equipment. The GCIBprocessing system can be any of the GCIB processing systems (100, 100′or 100″) described in FIG. 7, 8 or 9 (described below), or anycombination thereof.

The substrate can be disposed in a GCIB processing system. The substratecan be positioned on a substrate holder and may be securely held by thesubstrate holder, wherein the substrate holder locates the substraterelative to the GCIB. The temperature of the substrate may or may not becontrolled. For example, the substrate may be heated or cooled during afilm forming process. The environment surrounding the substrate ismaintained at a reduced pressure.

In 430, the substrate is oriented relative to the direction ofincidence. For example, as shown in FIG. 3A, GCIB 520 is directed atsubstrate 505 along a direction of incidence 521 substantially normal tosubstrate 505 (or substantially normal to the first plane 555). Therein,the orientation of substrate 505 relative to the direction of incidence521 of GCIB 520 may be varied by adjusting an inclination angle 570 ofsubstrate 505 relative to GCIB 520, i.e., tilting the substrate 505relative to the direction of incidence 521 of GCIB 520.

In 440, the structure 500 is irradiated with GCIB 520 to form a thinfilm on one or more of the first surfaces, wherein the formation of thethin film comprises constituents from the material source andconstituents from the substrate (i.e., the thin film is grown), orconstituents entirely from the material source (i.e., the thin film isdeposited). As shown in FIG. 3A, a thin film 530 is formed on at leastone first surface 550, specifically the top surfaces 512 of fins 510.The thin film 530 may serve as a screening layer when doping sidewalls516 of fins 510. The screening layer may absorb or trap dopant to avoidover-dosing the top surface 512 of the fin 510. Additionally, as shownin FIG. 3A, an optional thin film 540 is formed on another first surface550, specifically the base surface adjacent base 514 of fins 510. Theoptional thin film 540 may serve as an isolation layer betweenneighboring fins 510, as shown.

The formation of the thin film in 440 utilizing the GCIB may compriseselecting a beam energy (or beam acceleration potential), a beam energydistribution, a beam focus, and a beam dose to achieve a desiredthickness of the thin film on the first surfaces. Additionally, theformation of the GCIB may comprise accelerating the GCIB to achieve thebeam energy, focusing the GCIB to achieve the beam focus, irradiatingthe accelerated GCIB onto at least a portion of the substrate accordingto the beam dose, and forming the thin film on that irradiated portionof the substrate to achieve the thickness.

Herein, beam dose is given the units of number of clusters per unitarea. However, beam dose may also include beam current and/or time(e.g., GCIB dwell time). For example, the beam current may be measuredand maintained constant, while time is varied to change the beam dose.Alternatively, for example, the rate at which clusters strike thesurface of the substrate per unit area (i.e., number of clusters perunit area per unit time) may be held constant while the time is variedto change the beam dose.

Additionally, other GCIB properties may be varied to adjust the filmthickness, and other film properties such as the surface roughness,including, but not limited to, gas flow rate, stagnation pressure,cluster size, or gas nozzle design (such as nozzle throat diameter,nozzle length, and/or nozzle divergent section half-angle). Furthermore,other film properties may be varied by adjusting the GCIB propertiesincluding, but not limited to, film density, film quality, etc.

By way of example, the beam energy may range up to 100 keV, and the beamdose may range up to about 1×10¹⁶ clusters per cm². Alternatively, thebeam energy may range up to 50 keV, and the beam dose may range up toabout 1×10¹⁶ clusters per cm². Alternatively, the beam energy may rangeup to 25 keV, and the beam dose may range up to about 1×10¹⁶ clustersper cm². Alternatively, the beam energy may range up to 10 keV, and thebeam dose may range up to about 1×10¹⁶ clusters per cm². Alternatively,the beam energy may range up to 5 kV, and the beam dose may range up toabout 1×10¹⁶ clusters per cm². Alternatively, the beam energy may rangeup to 5 keV, and the beam dose may range up to about 8×10¹³ clusters percm². Alternatively, the beam energy may range up to 4 keV, and the beamdose may range up to about 1×1014 clusters per cm². Alternatively, thebeam energy may range up to 3 keV, and the beam dose may range up toabout 2×10¹⁴ clusters per cm². Alternatively yet, the beam energy mayrange up to 2 keV, and the beam dose may range up to about 1×10¹⁶clusters per cm².

By way of yet another example, the GCIB may be established for an energyper cluster atom (i.e., eV/cluster atom) ranging from about 0.5eV/cluster atom to about 10 eV/cluster atom. Alternatively, the energyper cluster atom may range from about 1 eV/cluster atom to about 10eV/cluster atom. Alternatively, the energy per cluster atom may rangefrom about 0.5 eV/cluster atom to about 1 eV/cluster atom. For instance,the ratio, energy per cluster atom, may be varied by varying the totalpressure at the inlet of the nozzle in the GCIB processing system toadjust the cluster size (e.g., number of atoms per cluster), or varyingthe beam acceleration potential to adjust the beam energy, or both.

As shown in FIG. 3B, the thin film 530 of thickness 556 is formed on thefirst surface 550, specifically the top surface 512 of fin 510, and isformed in part on one or more third surfaces 554, for example, thesurfaces that form the transition between a first surface 550 and asecond surface 552. The formation of thin film 530 on the secondsurfaces 552 may be substantially avoided as shown in FIG. 3A. Thethickness 556 may range up to about 500 nm (nanometers). Alternatively,the thickness 556 may range up to about 200 nm. Alternatively, thethickness 556 may range up to about 100 nm. Alternatively, the thickness556 may range up to about 50 nm. Alternatively, the thickness 556 mayrange up to about 25 nm. Alternatively yet, the thickness 556 may rangefrom about 4 nm to about 25 nm.

In one example, when growing the thin film, as the gas clusters collidewith the irradiated first surfaces, material is infused in the surfacelayer of the substrate or the underlying layer formed on substrate, andthis material becomes interspersed with the substrate material. As theGCIB dose is increased, the thickness of the grown thin film may beincreased until for a given GCIB energy (or GCIB acceleration potential)the film thickness saturates. As the GCIB energy is increased, thethickness of the grown thin film may be increased.

In another example, when depositing the thin film, as the gas clusterscollide with the irradiated first surfaces, material is infused within asublayer of the irradiated surface of the substrate at low GCIB dose,and eventually transitions to a purely deposition process at a higherGCIB dose. The infusion of material within the sublayer forms a mixedlayer, which acts as a graded interface between the underlying substratecomposition and the thin film subsequently deposited on the substrate.As the GCIB dose is increased, the thickness of the deposited thin filmmay be increased. Additionally, as the GCIB energy is increased, thethickness of the deposited thin film may be increased.

The forming of the thin film may comprise growing and/or depositingsilicon oxide (SiO_(x)), silicon nitride (SiN_(y)), or siliconoxynitride (SiO_(x)N_(y)), wherein the material source comprises one ormore silicon-containing precursors, one or more oxygen-containingprecursors, and/or one or more nitrogen-containing precursors, or anycombination of two or more thereof, and an optional inert gas.

Additionally, the forming of the thin film may include growing and/ordepositing a SiC_(x), SiO_(x)C_(y), or SiC_(x)N_(y) film on a substrateor layer on a substrate. Additionally yet, the forming of the thin filmmay include growing a germanide. According to embodiments of theinvention, the material source may thus comprise an oxygen-containinggas, a nitrogen-containing gas, a carbon-containing gas, ahydrogen-containing gas, a silicon-containing gas, or agermanium-containing gas, or a combination of two or more thereof.

When growing an oxide such as SiO_(x), a substrate comprising silicon ora silicon-containing material may be irradiated by a GCIB formed from amaterial source having an oxygen-containing gas. For example, thematerial source may comprise O₂. In another example, the material sourcemay comprise O₂, NO, NO₂, N₂O, CO, or CO₂, or any combination of two ormore thereof.

When growing a nitride such as SiN_(x), a substrate comprising siliconor a silicon-containing material may be irradiated by a GCIB formed froma material source having a nitrogen-containing gas. For example, thematerial source may comprise N₂. In another example, the material sourcemay comprise N₂, NO, NO₂, N₂O, or NH₃, or any combination of two or morethereof.

When growing a carbide such as SiC_(x), a substrate comprising siliconor a silicon-containing material, may be irradiated by a GCIB formedfrom a material source having a carbon-containing gas. For example, thematerial source may comprise CH₄. In another example, the materialsource may comprise CH₄ (or more generally a hydrocarbon gas, i.e.,C_(x)H_(y)), CO, or CO₂, or any combination of two or more thereof.

When growing an oxynitride such as SiO_(x)N_(y), a substrate comprisingsilicon or a silicon-containing material may be irradiated by a GCIBformed from a material source having an oxygen-containing gas and anitrogen-containing gas. For example, the material source may compriseO₂ and N₂, NO, NO₂, or N₂O, or any combination of two or more thereof.

When growing a carbonitride such as SiC_(x)N_(y), a substrate comprisingsilicon or a silicon-containing material may be irradiated by a GCIBformed from a material source mixture having a carbon-containing gas anda nitrogen-containing gas. For example, the material source may compriseCH₄ and N₂.

When growing a germanide such as SiGe, a substrate comprising silicon ora silicon-containing material may be irradiated by a GCIB formed from amaterial source having a germanium-containing gas. For example, thematerial source may comprise GeH₄ or Ge₂H₆, or both.

Exemplary data for growing a thin film using a GCIB is provided inpending U.S. patent application Ser. No. 12/144,968, entitled “METHODAND SYSTEM FOR GROWING A THIN FILM USING A GAS CLUSTER ION BEAM”, filedon Jun. 24, 2008; the entire content of this application is hereinincorporated by reference.

When depositing a thin film, the forming of a thin film may includedepositing a SiO_(x), SiN_(x), SiC_(x), SiO_(x)N_(y), SiC_(x)N_(y),SiO_(x)C_(y), SiO_(x)C_(y)N_(z), a-C, BN_(x), BSi_(x)N_(y), Ge, SiGe(B),or SiC(P) film on a substrate or layer on a substrate. According toembodiments of the invention, the material source may thus comprise anoxygen-containing gas, a nitrogen-containing gas, a carbon-containinggas, a boron-containing gas, a silicon-containing gas, aphosphorous-containing gas, a hydrogen-containing gas, or agermanium-containing gas, or a combination of two or more thereof. Whenthe material source contains gases which are incompatible, such assilane (SiH₄) and oxygen (O₂), the GCIB processing system may include amultiple nozzle gas source for independently introducing specificconstituents of the material source to the GCIB. Additional details of amultiple nozzle system are provided in co-pending U.S. patentapplication Ser. No. 12/428,945, entitled “MULTIPLE NOZZLE GAS CLUSTERION BEAM SYSTEM AND METHOD OF OPERATING”, filed on Apr. 23, 2009. Theentire content of this application is herein incorporated by referencein its entirety.

When depositing silicon, a substrate may be irradiated by a GCIB formedfrom a material source having a silicon-containing gas. For example, thepressurized gas mixture may comprise silane (SiH₄). In another example,the pressurized gas mixture may comprise disilane (Si₂H₆),dichlorosilane (SiH₂C₁₂), trichlorosilane (SiC₁₃H), diethylsilane(C₄H₁₂Si), trimethylsilane (C₃H₁₀Si), silicon tetrachloride (SiC₁₄), orsilicon tetrafluoride (SiF₄), or a combination of two or more thereof.

When depositing an oxide such as SiO_(x), a substrate may be irradiatedby a GCIB formed from a material source having a silicon-containing gasand an oxygen-containing gas. For example, the material source maycomprise silane (SiH₄) and O₂. In another example, the material sourcemay comprise N₂, NO, NO₂, N₂O, or NH₃, or any combination of two or morethereof.

When depositing a nitride such as SiN_(x), a substrate may be irradiatedby a GCIB formed from a material source having a silicon-containing gasand a nitrogen-containing gas. For example, the material source maycomprise silane (SiH₄) and N₂. In another example, the material sourcemay comprise N₂, NO, NO₂, N₂O, or NH₃, or any combination of two or morethereof.

When depositing a carbide such as SiC_(x), a substrate may be irradiatedby a GCIB formed from a material source having a silicon-containing gasand a carbon-containing gas. For example, the material source maycomprise silane (SiH₄) and CH₄. Additionally, for example, the materialsource may comprise silane (SiH₄) and methylsilane (H₃C—SiH₃).Furthermore, for example, the material source may comprise asilicon-containing gas and CH₄ (or more generally a hydrocarbon gas,i.e., C_(x)H_(y)), CO, or CO₂, or any combination of two or morethereof. Further yet, for example, the material source may comprise analkyl silane, an alkane silane, an alkene silane, or an alkyne silane,or any combination of two or more thereof. Additionally, for example,the material source may include silane, methylsilane (H₃C—SiH₃),dimethylsilane (H₃C—SiH₂—CH₃), trimethylsilane ((CH₃)₃—SiH), ortetramethylsilane ((CH₃)₄—Si), or any combination of two or morethereof. When forming a carbonitride such as SiC_(x)N_(y), the materialsource may further comprise a nitrogen-containing gas. For example, thenitrogen-containing gas may include N₂, NH₃, NF₃, NO, N₂O, or NO₂, or acombination of two or more thereof. The addition of anitrogen-containing gas may permit forming a silicon carbonitride film(SiCN).

When forming a nitride such as BN_(x), a substrate may be irradiated bya GCIB formed from a material source having a boron-containing gas and anitrogen-containing gas. For example, the material source may comprisediborane (B₂H₆) and N₂. In another example, the material source maycomprise N₂, NO, NO₂, N₂O, or NH₃, or any combination of two or morethereof.

When forming a nitride such as BSi_(x)N_(y), a substrate may beirradiated by a GCIB formed from a material source having asilicon-containing gas, a boron-containing gas, and anitrogen-containing gas. For example, the material source may comprisesilane (SiH₄), diborane (B₂H₆) and N₂. In another example, the materialsource may comprise N₂, NO, NO₂, N₂O, or NH₃, or any combination of twoor more thereof.

Exemplary data for depositing a thin film using a GCIB is provided inpending U.S. patent application Ser. No. 12/049,583, entitled “METHODAND SYSTEM FOR DEPOSITING SILICON CARBIDE FILM USING A GAS CLUSTER IONBEAM”, filed on Mar. 17, 2008; the entire content of this application isherein incorporated by reference.

In any one of the above examples, the material source may comprise anoptional inert gas. The optional inert gas may comprise a noble gas.

Referring again to FIG. 2, in 450, the directionality of the GCIBrelative to the substrate is controlled to adjust a first amount of thethin film formed on the one or more first surfaces relative to a secondamount of the thin film formed on the one or more second surfaces. Thedirectionality of the GCIB may be altered by modifying the beam energy,the beam energy distribution, the beam focus, or the beam dose, or anycombination of two or more thereof. For example, the directionality ofthe GCIB relative to the substrate may be controlled in order to formthe thin film on the one or more first surfaces, while substantiallyavoiding formation of the thin film on the one or more second surfaces.Furthermore, the controlling of the directionality of the GCIB relativeto the substrate may cause formation on one or more third surfacestransitioning between the one or more first surfaces and the one or moresecond surfaces. As shown in FIG. 3B, the forming of the thin film 530on the one or more first surfaces 550 may cause formation on one or morethird surfaces 554 transitioning between the one or more first surfaces550 and the one or more second surfaces 552.

As shown in FIG. 3A, the directionality of the GCIB 520 may berepresented by the direction of incidence 521 of the GCIB 520 and a beamdivergence 522 for GCIB 520. The beam divergence 522 may be illustratedin an angular distribution function relating the probability of acluster traveling in a specific direction relative to the direction ofincidence of the GCIB. For example, FIG. 3C graphically illustrates afirst angular distribution function 570 characterized by a first peak572 at a direction of incidence 575 (i.e., relative angle is 0°) and afirst width 574 (e.g., a full-width at half maximum (FWHM)).Additionally, for example, FIG. 3C illustrates a second angulardistribution function 570′ characterized by a second peak 572′ at thedirection of incidence 575 (i.e., relative angle is 0°) and a secondwidth 574′ (e.g., a full-width at half maximum (FWHM)). The firstangular distribution 570 represents a narrow distribution, while thesecond angular distribution 570′ represents a relatively broaderdistribution. Hence, the directionality of the GCIB may be adjusted byaltering the direction of incidence 575 of the GCIB (relative to thesubstrate) and/or altering the angular distribution function (e.g.,changing the angular distribution between the first angular distributionfunction 570 and the second angular distribution function 570′).

The beam divergence 522 may range up to 20°. Alternatively, the beamdivergence 522 may range up to 10°.

According to one embodiment, the directionality of the GCIB 520 relativeto substrate 505 may be controlled by adjusting the direction ofincidence 521 of GCIB 520 via change to the orientation of substrate 505relative to the direction of incidence 521 of GCIB 520. The orientationof substrate 505 may be altered by changing the inclination angle 570(i.e., tilting the substrate 505 relative to the direction of incidence521 of GCIB 520). Therein, the direction of incidence 521 of GCIB 520 ischanged relative to substrate 505, the first surfaces 550, and thesecond surfaces 552.

According to another embodiment, the directionality of the GCIB 520relative to substrate 505 may be controlled by adjusting the beamdivergence 522 of GCIB 520 via change to the angular distributionfunction of GCIB 520. The angular distribution function of GCIB 520 maybe altered by modifying the beam energy, the beam energy distribution,or the beam focus, or any combination of two or more thereof.

As an example, an increase in the beam energy (e.g., higher accelerationpotential) may cause a narrowing of the angular distribution functionfor the GCIB, while a decrease in the beam energy may cause a broadeningof the angular distribution function. As another example, a narrowing ofthe beam energy distribution function may cause a narrowing of theangular distribution function for the GCIB, while a broadening of thebeam energy distribution function may cause a broadening of the angulardistribution function. As yet another example, a focusing of the GCIBmay cause a narrowing of the angular distribution function for the GCIB,while a de-focusing of the GCIB may cause a broadening of the angulardistribution function.

The beam energy distribution function of the GCIB may be modified bydirecting the GCIB along a GCIB path through an increased pressure (tobe discussed in greater detail below). As an example, the path length(d) of the pressure cell may be set to d-23.3 cm and the pressure in thepressure cell may be elevated by introducing a background gas. Forinstance, when the background gas is introduced at a flow rate of 15sccm (standard cubic centimeters per minute) (“15P”) to the pressurecell, the pressure-distance integral is about 0.002 torr-cm.Additionally, for instance, when the background gas is introduced at aflow rate of 40 sccm (“40P”) to the pressure cell, the pressure-distanceintegral is about 0.005 torr-cm. Alternatively, the beam energydistribution function of the GCIB may be modified by altering the chargestate of the GCIB (to be discussed in greater detail below).

Referring now to FIGS. 4, 5A, and 5B, a method for doping a structure,such as a 3D structure, is described according to another embodiment.The method is illustrated by a flow chart 600 beginning in 610 withforming a structure, such as a non-planar (or 3D) structure, on asubstrate, wherein the structure has a plurality of surfaces includingone or more first surfaces lying substantially parallel to a first planeparallel with the substrate, and one or more second surfaces lyingsubstantially perpendicular to said first plane. The substrate caninclude a conductive material, a non-conductive material, or asemi-conductive material, or a combination of two or more materialsthereof. Additionally, the substrate may include one or more materialstructures formed thereon, or the substrate may be a blanket substratefree of material structures. For example, the structure may comprise amulti-gate field-effect transistor (MuFET), or a fin field-effecttransistor (FinFET). Additionally, for example, the structure maycomprise a via, a contact, a trench, a film stack, etc.

As shown in FIGS. 5A and 5B, a schematic cross-sectional view of astructure 700 is illustrated according to an embodiment. The structure700 comprises one or more fins 710, each having a base 714 at a basesurface of a substrate 705, a top surface 712, two sidewalls 716substantially parallel with one another extending between the base 714and the top surface 712, and at least one end wall (not shown) extendingbetween the base 714 and the top surface 716 and extending between thetwo sidewalls 716. At least one of the first surfaces 750, which includethe top surface 712 of each fin 710 and the base surface at thesubstrate 705, is oriented substantially parallel with a first plane 755(i.e., the plane within which substrate 705 lies). As shown in FIG. 5A,the first plane 755 may be substantially perpendicular to a GCIB 720. Inone embodiment, each of the first surfaces 750 is oriented substantiallyparallel with the first plane 755. Further, at least one of the secondsurfaces 752, which include sidewalls 716, is oriented substantiallyperpendicular with the first plane 755. In one embodiment, each of thesecond surfaces 752 is oriented substantially perpendicular with thefirst plane 755.

As an example, one or more second surfaces 752 that are substantiallyperpendicular to the first plane 755 may comprise an angular deviationof up to about 25 degrees from a surface normal of the first plane 755.Alternatively, one or more second surfaces 752 that are substantiallyperpendicular to the first plane 755 may comprise an angular deviationof up to about 20 degrees from a surface normal of the first plane 755.Alternatively, one or more second surfaces 752 that are substantiallyperpendicular to the first plane 755 may comprise an angular deviationof up to about 10 degrees from a surface normal of the first plane 755.Alternatively yet, one or more second surfaces 752 that aresubstantially perpendicular to the first plane 755 may comprise anangular deviation of up to about 5 degrees from a surface normal of thefirst plane 755.

Consequently, one or more first surfaces 750 that are substantiallyparallel with the first plane 755 may comprise an angular deviationgreater than about 75 degrees from a surface normal of the first plane755. Alternatively, one or more first surfaces 750 that aresubstantially parallel with the first plane 755 may comprise an angulardeviation greater than about 80 degrees from a surface normal of thefirst plane 755. Alternatively, one or more first surfaces 750 that aresubstantially parallel with the first plane 755 may comprise an angulardeviation greater than about 85 degrees from a surface normal of thefirst plane 755. Alternatively yet, one or more first surfaces 750 thatare substantially parallel with the first plane 755 may comprise anangular deviation greater than about 90 degrees from a surface normal ofthe first plane 755.

Referring again to FIG. 4, in 620, a gas cluster ion beam (GCIB) isformed or generated from a material source for a dopant is directedtoward the substrate with a direction of incidence relative to thesubstrate. The deviation of the direction of incidence of the GCIB mayvary plus or minus about 1 to 3 degrees due to variations in the GCIBprocessing equipment. The GCIB processing system can be any of the GCIBprocessing systems (100, 100′ or 100″) described in FIG. 7, 8, or 9(described below), or any combination thereof.

The substrate can be disposed in a GCIB processing system. The substratecan be positioned on a substrate holder and may be securely held by thesubstrate holder, wherein the substrate holder locates the substraterelative to the GCIB. The temperature of the substrate may or may not becontrolled. For example, the substrate may be heated or cooled during afilm forming process. The environment surrounding the substrate ismaintained at a reduced pressure.

In 630, the substrate is oriented relative to the direction ofincidence. For example, as shown in FIG. 5A, GCIB 720 is directed atsubstrate 705 along a direction of incidence 721 substantially normal tosubstrate 705. Therein, the orientation of substrate 705 relative to thedirection of incidence 721 of GCIB 720 may be varied by adjusting aninclination angle 770 of substrate 705 relative to GCIB 720, i.e.,tilting the substrate 705 relative to the direction of incidence 721 ofGCIB 720.

In 640, the structure 700 is irradiated with GCIB 720 to introduce adopant in one or more of the second surfaces. As shown in FIG. 5A, athin doped sublayer 762 is formed in at least one second surface 752,specifically the sidewalls 716 of fins 710. Additionally, another thindoped sublayer 760 is formed at an upper surface of fin 710. Forexample, the thin doped sublayer 760 may be formed at an upper surfaceof a screening layer 730 applied to at least one first surface 750,specifically the top surfaces 712 of fins 710. The screening layer 730may be formed prior to introducing dopant to the sidewalls 716 of fins710. Additionally, as shown in FIG. 5A, yet another doped sublayer 764may be formed on another first surface 750, specifically the basesurface adjacent base 714 of fins 710. Introducing the dopant in thesecond surfaces comprises using a material source having one or moreelements (hereafter “element(s)”) selected from the group consisting ofB, C, Si, Ge, N, P, As, O, S, and Cl.

The formation of the doped sublayer 762 in 640 utilizing the GCIB 720may comprise selecting a beam energy, a beam energy distribution, a beamfocus, and a beam dose to achieve a desired penetration depth of thedopant in the second surfaces 752. Additionally, the formation of theGCIB 720 may comprise accelerating the GCIB 720 to achieve the beamenergy, focusing the GCIB 720 to achieve the beam focus, irradiating theaccelerated GCIB 720 onto at least a portion of the substrate 705according to the beam dose, and introducing the dopant to thatirradiated portion of the substrate 705 to achieve the penetrationdepth.

As discussed above, beam dose is given the units of number of clustersper unit area. However, beam dose may also include beam current and/ortime (e.g., GCIB dwell time). For example, the beam current may bemeasured and maintained constant, while time is varied to change thebeam dose. Alternatively, for example, the rate at which clusters strikethe surface of the substrate per unit area (i.e., number of clusters perunit area per unit time) may be held constant while the time is variedto change the beam dose.

Additionally, other GCIB properties may be varied to adjust thepenetration depth, and other film properties such as the dopantconcentration and/or dopant concentration profile, including, but notlimited to, gas flow rate, stagnation pressure, cluster size, or gasnozzle design (such as nozzle throat diameter, nozzle length, and/ornozzle divergent section half-angle). Furthermore, other film propertiesmay be varied by adjusting the GCIB properties including, but notlimited to, sublayer composition, sublayer quality, etc.

As shown in FIGS. 5A and 5B, the thin doped sublayer 762 of penetrationdepth 763 is formed in the second surfaces 752, specifically thesidewalls 716 of fins 710. Additionally, the thin doped sublayer 760 ofpenetration depth 761 is formed within the screening layer 730 ofthickness 756 on the first surfaces 750, which include the top surfaces712 of fins 710. Furthermore, the doped sublayer 764 of penetrationdepth 765 is formed in the first surface 750 that includes the basesurface adjacent base 714 of fins 710. Further yet, the introduction ofdopant to the top surfaces 712 of fins 710 may be substantially avoidedas shown due to the screening layer 730.

The penetration depth 763 may range up to about 50 nm (nanometers).Alternatively, the penetration depth 763 may range up to about 20 nm.Alternatively, the penetration depth 763 may range up to about 10 nm.Alternatively, the penetration depth 763 may range up to about 5 nm.Alternatively, the penetration depth 763 may range up to about 4 nm.Alternatively yet, the penetration depth 763 may range from about 2 nmto about 5 nm.

The penetration depth 761 may range up to about 50 nm (nanometers).Alternatively, the penetration depth 761 may range up to about 30 nm.Alternatively, the penetration depth 761 may range up to about 20 nm.Alternatively, the penetration depth 761 may range up to about 15 nm.Alternatively, the penetration depth 761 may range up to about 10 nm.Alternatively yet, the penetration depth 761 may range from about 7 nmto about 10 nm.

The penetration depth 765 may range up to about 50 nm (nanometers).Alternatively, the penetration depth 765 may range up to about 30 nm.Alternatively, the penetration depth 765 may range up to about 20 nm.Alternatively, the penetration depth 765 may range up to about 15 nm.Alternatively, the penetration depth 765 may range up to about 10 nm.Alternatively yet, the penetration depth 765 may range from about 7 nmto about 10 nm.

A directionality of the GCIB relative to the substrate may be controlledto adjust a first amount of the dopant introduced to the first surfacesrelative to a second amount of the dopant introduced to the secondsurfaces. The directionality of the GCIB may be altered by modifying thebeam energy, the beam energy distribution, the beam focus, or the beamdose, or any combination of two or more thereof. For example, thedirectionality of the GCIB relative to the substrate may be controlledin order to introduce dopant to one or more second surfaces, whileattempting to reduce or minimize the introduction of dopant to one ormore first surfaces.

As discussed above in reference to FIG. 3A, the directionality of theGCIB may be represented by the direction of incidence of the GCIB and abeam divergence for GCIB. The beam divergence may be determined from anangular distribution function relating the probability of a clustertraveling in a specific direction relative to the direction of incidenceof the GCIB. Hence, the directionality of the GCIB may be adjusted byaltering the direction of incidence of the GCIB (relative to thesubstrate) and/or altering the angular distribution function.

Referring to FIG. 5A, according to one embodiment, the directionality ofthe GCIB 720 relative to substrate 705 may be controlled by adjustingthe direction of incidence 721 of GCIB 720 via change to the orientationof substrate 705 relative to the direction of incidence 721 of GCIB 720.The orientation of substrate 705 may be altered by changing theinclination angle 770 (i.e., tilting the substrate 705 relative to thedirection of incidence 721 of GCIB 720). Therein, the direction ofincidence 721 of GCIB 720 is changed relative to substrate 705, thefirst surfaces 750, and the second surfaces 752.

According to another embodiment, the directionality of the GCIB 720relative to substrate 705 may be controlled by adjusting the beamdivergence 722 of GCIB 720 via change to the angular distributionfunction of GCIB 720. The angular distribution function of GCIB 720 maybe altered by modifying the beam energy, the beam energy distribution,or the beam focus, or any combination of two or more thereof. The beamdivergence 722 may range up to 20°. Alternatively, the beam divergence722 may range up to 10°.

As an example, an increase in the beam energy (e.g., higher accelerationpotential) may cause a narrowing of the angular distribution functionfor the GCIB, while a decrease in the beam energy may cause a broadeningof the angular distribution function. As another example, a narrowing ofthe beam energy distribution function may cause a narrowing of theangular distribution function for the GCIB, while a broadening of thebeam energy distribution function may cause a broadening of the angulardistribution function. As yet another example, a focusing of the GCIBmay cause a narrowing of the angular distribution function for the GCIB,while a de-focusing of the GCIB may cause a broadening of the angulardistribution function.

The beam energy distribution function of the GCIB may be modified bydirecting the GCIB along a GCIB path through an increased pressure (tobe discussed in greater detail below). As an example, the path length(d) of the pressure cell may be set to d-23.3 cm and the pressure in thepressure cell may be elevated by introducing a background gas. Forinstance, when the background gas is introduced at a flow rate of 15sccm (standard cubic centimeters per minute) (“15P”) to the pressurecell, the pressure-distance integral is about 0.002 torr-cm.Additionally, for instance, when the background gas is introduced at aflow rate of 40 sccm (“40P”) to the pressure cell, the pressure-distanceintegral is about 0.005 torr-cm. Alternatively, the beam energydistribution function of the GCIB may be modified by altering the chargestate of the GCIB (to be discussed in greater detail below).

Although FIGS. 4, 5A, and 5B address doping the sidewall of a structure,the treatment of the sidewall may include one or more other GCIBprocesses. For example, the treatment of one or more second surfacesusing a GCIB may include doping, etching, cleaning, depositing a thinfilm on , growing a thin film on, modifying a property of, or smoothingthe one or more second surfaces, or any combination of two or morethereof. Additionally, for example, surface modification of one or moresecond surfaces may include modification of an optical, a thermal, amechanical, a chemical, and/or an electrical property of the one or moresecond surfaces, such as a refractive index, a thermal conductivity, athermal stability, an elastic modulus, a hardness, a dielectricconstant, a work function, a chemical resistance to, for example,various etch chemistries, etc.

Referring now to FIG. 6, a method for preparing a non-planar or 3Dstructure is described according to another embodiment. The method isillustrated by a flow chart 800 beginning in 810 with forming a fin on asubstrate. The fin may include any one of the fin structures describedin FIGS. 1, 3A, and 5A. For example, the fin may be utilized as a sourceand drain in a non-planar or 3D gate structure.

In 820, a screening layer is optionally formed on a top surface of thefin. The formation of the screening layer may include growing thescreening layer and/or depositing the screening layer. Additionally, thescreening layer may be deposited and/or grown using a conventionaltechnique, such as a thermal oxidation process, a vapor depositionprocess, a sputter deposition, a physical vapor deposition process, anionized physical vapor deposition process, a chemical vapor depositionprocess, or a plasma-enhanced chemical vapor deposition process. Any oneof these processes may be followed by an etching process to removematerial from a sidewall of the fin. Alternatively, the screening layermay be deposited and/or grown using a GCIB as described above. Forexample, the screening layer may comprise a layer of silicon oxide(SiO_(x)), silicon nitride (SiN_(y)), silicon oxynitride (SiO_(x)N_(y)),silicon-germanium (SiGe), or germanium (Ge).

In 830, a dopant is introduced to a sidewall of the fin. The dopant maybe introduced using a conventional technique, such as an ionimplantation process or a plasma immersion ion implantation process.Alternatively, the dopant may be introduced using a GCIB as describedabove. The dopant may comprise one or more elements selected from thegroup consisting of B, C, Si, Ge, N, P, As, O, S, and Cl.

Furthermore, a pre-treatment process and/or post-treatment process maybe performed to adjust one or more properties of the screening layerand/or doped sidewall including, but not limited to, a film thickness, afilm roughness, a film adhesion, a film composition, a dopantconcentration, a dopant concentration profile, etc. The pre-treatmentprocess and/or the post-treatment process may include exposure to an ionsource, a GCIB source, a photon source, an electron source, a plasmasource, a microwave radiation source, a thermal source, anelectro-magnetic (EM) radiation source, etc. For example, apre-treatment process may include exposing the substrate to anotherGCIB, exposing the substrate to a slotted plane antenna (SPA) plasma, orexposing the substrate to electro-magnetic (EM) radiation, or anycombination of two or more thereof. The exposure to another GCIB mayinclude performing an inert GCIB process or a GCIB growth process to,for instance, improve adhesion and/or assist the ensuing GCIB growthand/or deposition process to form the thin film. Additionally, forexample, a post-treatment process may include exposing the substrate toanother GCIB, annealing the substrate, exposing the substrate to aslotted plane antenna (SPA) plasma, or exposing the substrate toelectro-magnetic (EM) radiation, or any combination of two or morethereof.

Referring now to FIG. 7, a GCIB processing system 100 for forming theultra-thin films as described above is depicted according to anembodiment. The GCIB processing system 100 comprises a vacuum vessel102, substrate holder 150, upon which a substrate 152 to be processed isaffixed, and vacuum pumping systems 170A, 170B, and 170C. Substrate 152can be a semiconductor substrate, a wafer, a flat panel display (FPD), aliquid crystal display (LCD), or any other workpiece. GCIB processingsystem 100 is configured to produce a GCIB for treating substrate 152.

Referring still to GCIB processing system 100 in FIG. 7, the vacuumvessel 102 comprises three communicating chambers, namely, a sourcechamber 104, an ionization/acceleration chamber 106, and a processingchamber 108 to provide a reduced-pressure enclosure. The three chambersare evacuated to suitable operating pressures by vacuum pumping systems170A, 170B, and 170C, respectively. In the three communicating chambers104, 106, 108, a gas cluster beam can be formed in the first chamber(source chamber 104), while a GCIB can be formed in the second chamber(ionization/acceleration chamber 106) wherein the gas cluster beam isionized and accelerated. Then, in the third chamber (processing chamber108), the accelerated GCIB may be utilized to treat substrate 152.

As shown in FIG. 7, GCIB processing system 100 can comprise a materialsource having one or more gas sources configured to introduce one ormore gases or mixture of gases to vacuum vessel 102. For example, afirst gas composition stored in a first gas source 111 is admitted underpressure through a first gas control valve 113A to a gas metering valveor valves 113. Additionally, for example, a second gas compositionstored in a second gas source 112 is admitted under pressure through asecond gas control valve 113B to the gas metering valve or valves 113.Furthermore, for example, the first gas composition or the second gascomposition or both can comprise a film-forming gas composition, or adopant source gas composition. Further yet, for example, the first gascomposition or second gas composition or both can include a condensableinert gas, carrier gas or dilution gas. For example, the inert gas,carrier gas or dilution gas can include a noble gas, i.e., He, Ne, Ar,Kr, Xe, or Rn.

Furthermore, the first gas source 111 and the second gas source 112 maybe utilized either alone or in combination with one another to produceionized clusters. The film-forming gas composition can comprise a filmprecursor or precursors that include the principal atomic or molecularspecies of the film desired to be produced, deposited, or grown on thesubstrate. The dopant source gas composition can comprise dopant(s)desired for introduction into one or more surfaces of the substrate.

The high pressure, condensable gas comprising the first gas compositionor the second gas composition or both is introduced through gas feedtube 114 into stagnation chamber 116 and is ejected into thesubstantially lower pressure vacuum through a properly shaped nozzle110. As a result of the expansion of the high pressure, condensable gasfrom the stagnation chamber 116 to the lower pressure region of thesource chamber 104, the gas velocity accelerates to supersonic speedsand gas cluster beam 118 emanates from nozzle 110.

The inherent cooling of the jet as static enthalpy is exchanged forkinetic energy, which results from the expansion in the jet, causes aportion of the gas jet to condense and form a gas cluster beam 118having clusters, each consisting of from several to several thousandweakly bound atoms or molecules. A gas skimmer 120, positioneddownstream from the exit of the nozzle 110 between the source chamber104 and ionization/acceleration chamber 106, partially separates the gasmolecules on the peripheral edge of the gas cluster beam 118, that maynot have condensed into a cluster, from the gas molecules in the core ofthe gas cluster beam 118, that may have formed clusters. Among otherreasons, this selection of a portion of gas cluster beam 118 can lead toa reduction in the pressure in the downstream regions where higherpressures may be detrimental (e.g., ionizer 122, and processing chamber108). Furthermore, gas skimmer 120 defines an initial dimension for thegas cluster beam entering the ionization/acceleration chamber 106.

After the gas cluster beam 118 has been formed in the source chamber104, the constituent gas clusters in gas cluster beam 118 are ionized byionizer 122 to form GCIB 128. The ionizer 122 may include an electronimpact ionizer that produces electrons from one or more filaments 124,which are accelerated and directed to collide with the gas clusters inthe gas cluster beam 118 inside the ionization/acceleration chamber 106.Upon collisional impact with the gas cluster, electrons of sufficientenergy eject electrons from molecules in the gas clusters to generateionized molecules. The ionization of gas clusters can lead to apopulation of charged gas cluster ions, generally having a net positivecharge.

As shown in FIG. 7, beam electronics 130 are utilized to ionize,extract, accelerate, and focus the GCIB 128. The beam electronics 130include a filament power supply 136 that provides voltage V_(F) to heatthe ionizer filament 124.

Additionally, the beam electronics 130 include a set of suitably biasedhigh voltage electrodes 126 in the ionization/acceleration chamber 106that extracts the cluster ions from the ionizer 122. The high voltageelectrodes 126 then accelerate the extracted cluster ions to a desiredenergy and focus them to define GCIB 128. The kinetic energy of thecluster ions in GCIB 128 typically ranges from about 1000 electron volts(1 keV) to several tens of keV. For example, GCIB 128 can be acceleratedto 1 to 100 keV.

As illustrated in FIG. 7, the beam electronics 130 further include ananode power supply 134 that provides voltage V_(A) to an anode ofionizer 122 for accelerating electrons emitted from filament 124 andcausing the electrons to bombard the gas clusters in gas cluster beam118, which produces cluster ions.

Additionally, as illustrated in FIG. 7, the beam electronics 130 includean extraction power supply 138 that provides voltage V_(E) to bias atleast one of the high voltage electrodes 126 to extract ions from theionizing region of ionizer 122 and to form the GCIB 128. For example,extraction power supply 138 provides a voltage to a first electrode ofthe high voltage electrodes 126 that is less than or equal to the anodevoltage of ionizer 122.

Furthermore, the beam electronics 130 can include an accelerator powersupply 140 that provides voltage V_(Acc) to bias one of the high voltageelectrodes 126 with respect to the ionizer 122 so as to result in atotal GCIB acceleration energy equal to about V_(Acc) electron volts(eV). For example, accelerator power supply 140 provides a voltage to asecond electrode of the high voltage electrodes 126 that is less than orequal to the anode voltage of ionizer 122 and the extraction voltage ofthe first electrode.

Further yet, the beam electronics 130 can include lens power supplies142, 144 that may be provided to bias some of the high voltageelectrodes 126 with potentials (e.g., V_(D) and V_(L2)) to focus theGCIB 128. For example, lens power supply 142 can provide a voltage to athird electrode of the high voltage electrodes 126 that is less than orequal to the anode voltage of ionizer 122, the extraction voltage of thefirst electrode, and the accelerator voltage of the second electrode,and lens power supply 144 can provide a voltage to a fourth electrode ofthe high voltage electrodes 126 that is less than or equal to the anodevoltage of ionizer 122, the extraction voltage of the first electrode,the accelerator voltage of the second electrode, and the first lensvoltage of the third electrode.

Note that many variants on both the ionization and extraction schemesmay be used. While the scheme described here is useful for purposes ofinstruction, another extraction scheme involves placing the ionizer andthe first element of the extraction electrode(s) (or extraction optics)at V_(Acc). This typically requires fiber optic programming of controlvoltages for the ionizer power supply, but creates a simpler overalloptics train. The invention described herein is useful regardless of thedetails of the ionizer and extraction lens biasing.

A beam filter 146 in the ionization/acceleration chamber 106 downstreamof the high voltage electrodes 126 can be utilized to eliminatemonomers, or monomers and light cluster ions from the GCIB 128 to definea filtered process GCIB 128A that enters the processing chamber 108. Inone embodiment, the beam filter 146 substantially reduces the number ofclusters having 100 or less atoms or molecules or both. The beam filtermay comprise a magnet assembly for imposing a magnetic field across theGCIB 128 to aid in the filtering process.

Referring still to FIG. 7, a beam gate 148 is disposed in the path ofGCIB 128 in the ionization/acceleration chamber 106. Beam gate 148 hasan open state in which the GCIB 128 is permitted to pass from theionization/acceleration chamber 106 to the processing chamber 108 todefine process GCIB 128A, and a closed state in which the GCIB 128 isblocked from entering the processing chamber 108. A control cableconducts control signals from control system 190 to beam gate 148. Thecontrol signals controllably switch beam gate 148 between the open orclosed states.

A substrate 152, which may be a wafer or semiconductor wafer, a flatpanel display (FPD), a liquid crystal display (LCD), or other substrateto be processed by GCIB processing, is disposed in the path of theprocess GCIB 128A in the processing chamber 108. Because mostapplications contemplate the processing of large substrates withspatially uniform results, a scanning system may be desirable touniformly scan the process GCIB 128A across large areas to producespatially homogeneous results.

An X-scan actuator 160 provides linear motion of the substrate holder150 in the direction of X-scan motion (into and out of the plane of thepaper). A Y-scan actuator 162 provides linear motion of the substrateholder 150 in the direction of Y-scan motion 164, which is typicallyorthogonal to the X-scan motion. The combination of X-scanning andY-scanning motions translates the substrate 152, held by the substrateholder 150, in a raster-like scanning motion through process GCIB 128Ato cause a uniform (or otherwise programmed) irradiation of a surface ofthe substrate 152 by the process GCIB 128A for processing of thesubstrate 152. Furthermore, a substrate tilt actuator 163 providesangular motion of the substrate holder 150 about an axis that isco-planar with the direction of X-scan motion and Y-scan motion. Thesubstrate tilt actuator 163 can tilt the substrate holder 150 relativeto process GCIB 128A and, thereby, alter the inclination angle ofsubstrate 152. For example, the substrate tilt actuator 163 may be usedto alter inclination angle 570 of substrate 505 (see FIG. 5A) orinclination angle 770 of substrate 705 (see FIG. 5B). Although notshown, substrate holder 150 may have additional rotational degrees offreedom.

The substrate holder 150 disposes the substrate 152 at an angle withrespect to the axis of the process GCIB 128A so that the process GCIB128A has an angle of beam incidence 166 with respect to a substrate 152surface. The angle of beam incidence 166 may be 90 degrees or some otherangle, but is typically 90 degrees or near 90 degrees. DuringY-scanning, the substrate 152 and the substrate holder 150 move from theshown position to the alternate position “A” indicated by thedesignators 152A and 150A, respectively. Notice that in moving betweenthe two positions, the substrate 152 is scanned through the process GCIB128A, and in both extreme positions, is moved completely out of the pathof the process GCIB 128A (over-scanned). Though not shown explicitly inFIG. 7, similar scanning and over-scan is performed in the (typically)orthogonal X-scan motion direction (in and out of the plane of thepaper).

A beam current sensor 180 may be disposed beyond the substrate holder150 in the path of the process GCIB 128A so as to intercept a sample ofthe process GCIB 128A when the substrate holder 150 is scanned out ofthe path of the process GCIB 128A. The beam current sensor 180 istypically a faraday cup or the like, closed except for a beam-entryopening, and is typically affixed to the wall of the vacuum vessel 102with an electrically insulating mount 182. Additionally, the beamcurrent sensor 180 may be configured to calibrate and/or profile theinteraction of a tilted surface with the process GCIB 128A. Theinventors expect the beam current profile to be a function of substratetilt angle (due to, for instance, asymmetric scattering of the beam byan inclined surface). For example, the beam current sensor may comprisean opening surface, such as an upper surface of the substrate holder150, having a plurality of beam-entry openings, wherein each beam-entryopening is constructed for a specific angle of incidence or tiltrelative to the process GCIB 128A. As a beam-entry opening passesthrough the process GCIB 128A, the beam current is measured by the beamcurrent sensor 180.

As shown in FIG. 7, control system 190 connects to the X-scan actuator160, the Y-scan actuator 162, and the substrate tilt actuator 163through electrical cable and controls the X-scan actuator 160, theY-scan actuator 162, and the substrate tilt actuator 163 in order toplace the substrate 152 into or out of the process GCIB 128A, scan thesubstrate 152 uniformly relative to the process GCIB 128A to achievedesired processing of the substrate 152 by the process GCIB 128A, andorient the substrate 152 relative to the process GCIB 128A. Controlsystem 190 receives the sampled beam current collected by the beamcurrent sensor 180 by way of an electrical cable and, thereby, monitorsthe GCIB and controls the GCIB dose received by the substrate 152 byremoving the substrate 152 from the process GCIB 128A when apredetermined dose has been delivered.

The substrate tilt actuator 163 can be utilized to angle the substrate152 relative to the process GCIB 128A such that the process GCIB 128A issubstantially parallel with one or more surfaces and irradiates one ormore other surfaces with a non-parallel angle of beam incidence 166. Forexample, by tilting the substrate 152 having a 3D or non-planarstructure thereon with a plurality of parallel surfaces and a pluralityof perpendicular surfaces, the process GCIB 128A can be directed at thesubstrate 152 with a parallel relationship with a parallel surface and anon-parallel relationship with a perpendicular surface, or vice-versa.Alternately, by tilting the substrate 152, the process GCIB 128A can bedirected at the substrate 152 with a parallel relationship with oneparallel surface and a non-parallel relationship with another parallelsurface. Still alternately, by tilting the substrate 152, the processGCIB 128A can be directed at the substrate 152 with a parallelrelationship with one perpendicular surface and a non-parallelrelationship with another perpendicular surface.

In the embodiment shown in FIG. 8, the GCIB processing system 100′ canbe similar to the embodiment of FIG. 7 and further comprise a X-Y-tiltpositioning table 253 (or substrate holder) operable to hold and move asubstrate 252 in two axes, effectively scanning the substrate 252relative to the process GCIB 128A. For example, the X-motion can includemotion into and out of the plane of the paper, and the Y-motion caninclude motion along direction 264. Furthermore, the X-Y-tiltpositioning table 253 is operable to tilt substrate 252 relative to theprocess GCIB 128A. For example, the tilt motion can include angularmotion along direction 263. Although not shown, X-Y-tilt positioningtable 253 may have additional rotational degrees of freedom.

The process GCIB 128A impacts the substrate 252 at a projected impactregion 286 on a surface of the substrate 252, and at an angle of beamincidence 266 with respect to the surface of substrate 252. By X-Ymotion, the X-Y-tilt positioning table 253 can position each portion ofa surface of the substrate 252 in the path of process GCIB 128A so thatevery region of the surface may be made to coincide with the projectedimpact region 286 for processing by the process GCIB 128A. An X-Ycontroller 262 provides electrical signals to the X-Y-tilt positioningtable 253 through an electrical cable for controlling the position andvelocity in each of X-axis and Y-axis directions. The X-Y controller 262receives control signals from, and is operable by, control system 190through an electrical cable. X-Y-tilt positioning table 253 moves bycontinuous motion or by stepwise motion according to conventional X-Ytable positioning technology to position different regions of thesubstrate 252 within the projected impact region 286. In one embodiment,X-Y-tilt positioning table 253 is programmably operable by the controlsystem 190 to scan, with programmable velocity, any portion of thesubstrate 252 through the projected impact region 286 for GCIBprocessing by the process GCIB 128A. In another embodiment, X-Y-tiltpositioning table 253 is programmably operable by the control system 190to scan and tilt, with programmable velocity, any portion of thesubstrate 252 through the projected impact region 286 for GCIBprocessing by the process GCIB 128A.

The substrate holding surface 254 of positioning table 253 iselectrically conductive and is connected to a dosimetry processoroperated by control system 190. An electrically insulating layer 255 ofpositioning table 253 isolates the substrate 252 and substrate holdingsurface 254 from the base portion 260 of the positioning table 253.Electrical charge induced in the substrate 252 by the impinging processGCIB 128A is conducted through substrate 252 and substrate holdingsurface 254, and a signal is coupled through the positioning table 253to control system 190 for dosimetry measurement. Dosimetry measurementhas integrating means for integrating the GCIB current to determine aGCIB processing dose. Under certain circumstances, a target-neutralizingsource (not shown) of electrons, sometimes referred to as electronflood, may be used to neutralize the process GCIB 128A. In such case, aFaraday cup (not shown, but which may be similar to beam current sensor180 in FIG. 7) may be used to assure accurate dosimetry despite theadded source of electrical charge, the reason being that typical Faradaycups allow only the high energy positive ions to enter and be measured.

In operation, the control system 190 signals the opening of the beamgate 148 to irradiate the substrate 252 with the process GCIB 128A. Thecontrol system 190 monitors measurements of the GCIB current collectedby the substrate 252 in order to compute the accumulated dose receivedby the substrate 252. When the dose received by the substrate 252reaches a predetermined dose, the control system 190 closes the beamgate 148 and processing of the substrate 252 is complete. Based uponmeasurements of the GCIB dose received for a given area of the substrate252, the control system 190 can adjust the scan velocity in order toachieve an appropriate beam dwell time to treat different regions of thesubstrate 252.

Alternatively, the process GCIB 128A may be scanned at a constantvelocity in a fixed pattern across the surface of the substrate 252;however, the GCIB intensity is modulated (may be referred to as Z-axismodulation) to deliver an intentionally non-uniform dose to the sample.The GCIB intensity may be modulated in the GCIB processing system 100′by any of a variety of methods, including varying the gas flow from aGCIB source supply; modulating the ionizer 122 by either varying afilament voltage V_(F) or varying an anode voltage V_(A); modulating thelens focus by varying lens voltages V_(D) and/or V_(L2); or mechanicallyblocking a portion of the GCIB with a variable beam block, adjustableshutter, or variable aperture. The modulating variations may becontinuous analog variations or may be time modulated switching orgating.

The processing chamber 108 may further include an in-situ metrologysystem. For example, the in-situ metrology system may include an opticaldiagnostic system having an optical transmitter 280 and optical receiver282 configured to illuminate substrate 252 with an incident opticalsignal 284 and to receive a scattered optical signal 288 from substrate252, respectively. The optical diagnostic system comprises opticalwindows to permit the passage of the incident optical signal 284 and thescattered optical signal 288 into and out of the processing chamber 108.Furthermore, the optical transmitter 280 and the optical receiver 282may comprise transmitting and receiving optics, respectively. Theoptical transmitter 280 receives, and is responsive to, controllingelectrical signals from the control system 190. The optical receiver 282returns measurement signals to the control system 190.

The in-situ metrology system may comprise any instrument configured tomonitor the progress of the GCIB processing. According to oneembodiment, the in-situ metrology system may constitute an opticalscatterometry system. The scatterometry system may include ascatterometer, incorporating beam profile ellipsometry (ellipsometer)and beam profile reflectometry (reflectometer), commercially availablefrom Therma-Wave, Inc. (1250 Reliance Way, Fremont, Calif. 94539) orNanometrics, Inc. (1550 Buckeye Drive, Milpitas, Calif. 95035).

For instance, the in-situ metrology system may include an integratedOptical Digital Profilometry (iODP) scatterometry module configured tomeasure process performance data resulting from the execution of atreatment process in the GCIB processing system 100′. The metrologysystem may, for example, measure or monitor metrology data resultingfrom the treatment process. The metrology data can, for example, beutilized to determine process performance data that characterizes thetreatment process, such as a process rate, a relative process rate, afeature profile angle, a critical dimension, a feature thickness ordepth, a feature shape, etc. For example, in a process for directionallydepositing material on a substrate, process performance data can includea critical dimension (CD), such as a top, middle or bottom CD in afeature (i.e., via, line, etc.), a feature depth, a material thickness,a sidewall angle, a sidewall shape, a deposition rate, a relativedeposition rate, a spatial distribution of any parameter thereof, aparameter to characterize the uniformity of any spatial distributionthereof, etc. Operating the X-Y-tilt positioning table 253 via controlsignals from control system 190, the in-situ metrology system can mapone or more characteristics of the substrate 252.

In the embodiment shown in FIG. 9, the GCIB processing system 100″ canbe similar to the embodiment of FIG. 7 and further comprise a pressurecell chamber 350 positioned, for example, at or near an outlet region ofthe ionization/acceleration chamber 106. The pressure cell chamber 350comprises an inert gas source 352 configured to supply a background gasto the pressure cell chamber 350 for elevating the pressure in thepressure cell chamber 350, and a pressure sensor 354 configured tomeasure the elevated pressure in the pressure cell chamber 350.

The pressure cell chamber 350 may be configured to modify the beamenergy distribution of GCIB 128 to produce a modified processing GCIB128A′. This modification of the beam energy distribution is achieved bydirecting GCIB 128 along a GCIB path through an increased pressureregion within the pressure cell chamber 350 such that at least a portionof the GCIB traverses the increased pressure region. The extent ofmodification to the beam energy distribution may be characterized by apressure-distance integral along that portion of the GCIB path, wheredistance (or length of the pressure cell chamber 350) is indicated bypath length (d). When the value of the pressure-distance integral isincreased (either by increasing the pressure and/or the path length(d)), the beam energy distribution is broadened and the peak energy isdecreased. When the value of the pressure-distance integral is decreased(either by decreasing the pressure and/or the path length (d)), the beamenergy distribution is narrowed and the peak energy is increased.Further details for the design of a pressure cell may be determined fromU.S. Pat. No. 7,060,989,entitled METHOD AND APPARATUS FOR IMPROVEDPROCESSING WITH A GAS-CLUSTER ION BEAM; the content of which isincorporated herein by reference in its entirety.

Control system 190 comprises a microprocessor, memory, and a digital I/Oport capable of generating control voltages sufficient to communicateand activate inputs to GCIB processing system 100 (or 100′, 100″), aswell as monitor outputs from GCIB processing system 100 (or 100′, 100″).Moreover, control system 190 can be coupled to and can exchangeinformation with vacuum pumping systems 170A, 170B, and 170C, first gassource 111, second gas source 112, first gas control valve 113A, secondgas control valve 113B, beam electronics 130, beam filter 146, beam gate148, the X-scan actuator 160, the Y-scan actuator 162, and beam currentsensor 180. For example, a program stored in the memory can be utilizedto activate the inputs to the aforementioned components of GCIBprocessing system 100 according to a process recipe in order to performa GCIB process on substrate 152.

However, the control system 190 may be implemented as a general purposecomputer system that performs a portion or all of the microprocessorbased processing steps of the invention in response to a processorexecuting one or more sequences of one or more instructions contained ina memory. Such instructions may be read into the controller memory fromanother computer readable medium, such as a hard disk or a removablemedia drive. One or more processors in a multi-processing arrangementmay also be employed as the controller microprocessor to execute thesequences of instructions contained in main memory. In alternativeembodiments, hard-wired circuitry may be used in place of or incombination with software instructions. Thus, embodiments are notlimited to any specific combination of hardware circuitry and software.

The control system 190 can be used to configure any number of processingelements, as described above, and the control system 190 can collect,provide, process, store, and display data from processing elements. Thecontrol system 190 can include a number of applications, as well as anumber of controllers, for controlling one or more of the processingelements. For example, control system 190 can include a graphic userinterface (GUI) component (not shown) that can provide interfaces thatenable a user to monitor and/or control one or more processing elements.

Control system 190 can be locally located relative to the GCIBprocessing system 100 (or 100′, 100″), or it can be remotely locatedrelative to the GCIB processing system 100 (or 100′, 100″). For example,control system 190 can exchange data with GCIB processing system 100using a direct connection, an intranet, and/or the Internet. Controlsystem 190 can be coupled to an intranet at, for example, a customersite (i.e., a device maker, etc.), or it can be coupled to an intranetat, for example, a vendor site (i.e., an equipment manufacturer).Alternatively or additionally, control system 190 can be coupled to theInternet. Furthermore, another computer (i.e., controller, server, etc.)can access control system 190 to exchange data via a direct connection,an intranet, and/or the Internet.

Substrate 152 (or 252) can be affixed to the substrate holder 150 (orsubstrate holder 250) via a clamping system (not shown), such as amechanical clamping system or an electrical clamping system (e.g., anelectrostatic clamping system). Furthermore, substrate holder 150 (or250) can include a heating system (not shown) or a cooling system (notshown) that is configured to adjust and/or control the temperature ofsubstrate holder 150 (or 250) and substrate 152 (or 252).

Vacuum pumping systems 170A, 170B, and 170C can include turbo-molecularvacuum pumps (TMP) capable of pumping speeds up to about 5000 liters persecond (and greater) and a gate valve for throttling the chamberpressure. In conventional vacuum processing devices, a 1000 to 3000liter per second TMP can be employed. TMPs are useful for low pressureprocessing, typically less than about 50 mTorr. Although not shown, itmay be understood that pressure cell chamber 350 may also include avacuum pumping system. Furthermore, a device for monitoring chamberpressure (not shown) can be coupled to the vacuum vessel 102 or any ofthe three vacuum chambers 104, 106, 108. The pressure-measuring devicecan be, for example, a capacitance manometer or ionization gauge.

Referring now to FIG. 10, a section 300 of a gas cluster ionizer (122,FIGS. 7, 8 and 9) for ionizing a gas cluster jet (gas cluster beam 118,FIGS. 7, 8 and 9) is shown. The section 300 is normal to the axis ofGCIB 128. For typical gas cluster sizes (2000 to 15000 atoms), clustersleaving the skimmer aperture (120, FIGS. 7, 8 and 9) and entering anionizer (122, FIGS. 7, 8 and 9) will travel with a kinetic energy ofabout 130 to 1000 electron volts (eV). At these low energies, anydeparture from space charge neutrality within the ionizer 122 willresult in a rapid dispersion of the jet with a significant loss of beamcurrent. FIG. 10 illustrates a self-neutralizing ionizer. As with otherionizers, gas clusters are ionized by electron impact. In this design,thermo-electrons (seven examples indicated by 310) are emitted frommultiple linear thermionic filaments 302 a, 302 b, and 302 c (typicallytungsten) and are extracted and focused by the action of suitableelectric fields provided by electron-repeller electrodes 306 a, 306 b,and 306 c and beam-forming electrodes 304 a, 304 b, and 304 c.Thermo-electrons 310 pass through the gas cluster jet and the jet axisand then strike the opposite beam-forming electrode 304 b to produce lowenergy secondary electrons (312, 314, and 316 indicated for examples).

Though (for simplicity) not shown, linear thermionic filaments 302 b and302 c also produce thermo-electrons that subsequently produce low energysecondary electrons. All the secondary electrons help ensure that theionized cluster jet remains space charge neutral by providing low energyelectrons that can be attracted into the positively ionized gas clusterjet as required to maintain space charge neutrality. Beam-formingelectrodes 304 a, 304 b, and 304 c are biased positively with respect tolinear thermionic filaments 302 a, 302 b, and 302 c andelectron-repeller electrodes 306 a, 306 b, and 306 c are negativelybiased with respect to linear thermionic filaments 302 a, 302 b, and 302c. Insulators 308 a, 308 b, 308 c, 308 d, 308 e, and 308 f electricallyinsulate and support electrodes 304 a, 304 b, 304 c, 306 a, 306 b, and306 c. For example, this self-neutralizing ionizer is effective andachieves over 1000 micro Amps argon GCIBs.

Alternatively, ionizers may use electron extraction from plasma toionize clusters. The geometry of these ionizers is quite different fromthe three filament ionizer described here but the principles ofoperation and the ionizer control are very similar. For example, theionizer design may be similar to the ionizer described in U.S. Pat. No.7,173,252, entitled IONIZER AND METHOD FOR GAS-CLUSTER ION-BEAMFORMATION; the content of which is incorporated herein by reference inits entirety.

The gas cluster ionizer (122, FIGS. 7, 8 and 9) may be configured tomodify the beam energy distribution of GCIB 128 by altering the chargestate of the GCIB 128. For example, the charge state may be modified byadjusting an electron flux, an electron energy, or an electron energydistribution for electrons utilized in electron collision-inducedionization of gas clusters.

Although only certain embodiments of this invention have been describedin detail above, those skilled in the art will readily appreciate thatmany modifications are possible in the embodiments without materiallydeparting from the novel teachings and advantages of this invention.Accordingly, all such modifications are intended to be included withinthe scope of this invention.

1. A method for preparing a non-planar structure, comprising: formingsaid non-planar structure on a substrate; generating a gas cluster ionbeam (GCIB) formed from a material source for treatment of saidnon-planar structure; tilting said substrate relative to said GCIB; andirradiating said non-planar structure with said GCIB.
 2. The method ofclaim 1, wherein said irradiating said non-planar structure with saidGCIB facilitates etching at least a portion of a surface on saidnon-planar structure, cleaning at least a portion of a surface on saidnon-planar structure, depositing a thin film on at least a portion of asurface on said non-planar structure, growing a thin film on at least aportion of a surface on said non-planar structure, modifying a propertyof at least a portion of a surface on said non-planar structure, dopingat least a portion of a surface on said non-planar structure, orsmoothing at least a portion of a surface on said non-planar structure,or any combination of two or more thereof.
 3. The method of claim 1,wherein said irradiating said non-planar structure with said GCIBfacilitates growing and/or depositing a layer of silicon oxide(SiO_(x)), silicon nitride (SiN_(y)), silicon carbide (SiC_(z)), siliconoxynitride (SiO_(x)N_(y)), silicon carbonitride (SiC_(z)N_(y)),silicon-germanium (SiGe), or germanium (Ge) on at least a portion of asurface on said non-planar structure.
 4. The method of claim 1, whereinsaid irradiating said non-planar structure with said GCIB facilitatesdoping at least a portion of a surface on said non-planar structure withone or more elements selected from the group consisting of B, C, Si, Ge,N, P, As, O, S, and Cl.
 5. The method of claim 1, wherein saidirradiating said non-planar structure with said GCIB facilitates etchingat least a portion of a surface on said non-planar structure using ahalogen-containing GCIB.
 6. The method of claim 1, wherein saidnon-planar structure comprises first and second perpendicular surfacesassociated with said non-planar structure and oriented substantiallyperpendicular to said substrate, and wherein said tilting said substratecomprises tilting said substrate such that said GCIB remainssubstantially parallel with a plane in which lies said firstperpendicular surface and such that said GCIB establishes a non-parallelangle of incidence with said second perpendicular surface.
 7. The methodof claim 6, wherein said irradiating said second perpendicular surfacewith said GCIB facilitates etching said second perpendicular surface,cleaning said second perpendicular surface, depositing a thin film onsaid second perpendicular surface, growing a thin film on said secondperpendicular surface, modifying a property of said second perpendicularsurface, doping said second perpendicular surface, or smoothing saidsecond perpendicular surface, or any combination of two or more thereof.8. The method of claim 6, wherein said irradiating said secondperpendicular surface with said GCIB facilitates growing and/ordepositing a thin film on said second perpendicular surface whilesubstantially avoiding growing and/or depositing another thin film onsaid first perpendicular surface.
 9. The method of claim 6, wherein saidirradiating said second perpendicular surface with said GCIB facilitatesdoping said second perpendicular surface while substantially avoidingdoping of said first perpendicular surface.
 10. The method of claim 6,wherein said irradiating said second perpendicular surface with saidGCIB facilitates etching said second perpendicular surface whilesubstantially avoiding etching of said first perpendicular surface. 11.The method of claim 6, further comprising: selecting a beam energy, abeam energy distribution, a beam focus, and a beam dose for treatingsaid second perpendicular surface; accelerating said GCIB to achievesaid beam energy; focusing said GCIB to achieve said beam focus; andirradiating said accelerated GCIB onto at least a portion of saidsubstrate according to said beam dose.
 12. The method of claim 12,further comprising: modifying said beam energy, modifying said beamenergy distribution, modifying said beam focus, modifying said beamdose, or adjusting said tilting of said substrate, or performing anycombination of two or more thereof.
 13. The method of claim 1, furthercomprising: adjusting said tilting of said substrate from a firstlocation of said substrate relative to said GCIB to a second location ofsaid substrate relative to said GCIB in a continuous manner or step-wisemanner.
 14. A GCIB processing system, comprising: a vacuum vessel; a gascluster ion beam (GCIB) source disposed in said vacuum vessel andconfigured to produce a GCIB; a substrate holder configured to support asubstrate inside said vacuum vessel for treatment by said GCIB; a scanactuator coupled to said substrate holder and configured to scan saidsubstrate holder through said GCIB; a substrate tilt actuator coupled tosaid substrate holder and configured to tilt said substrate holderrelative to said GCIB; and a control system coupled to said scanactuator and said substrate tilt actuator, and configured toprogrammably operate said scan actuator and said substrate tilt actuatorto scan and tilt, with programmable velocity, any portion of thesubstrate through the projected impact region for GCIB processing bysaid GCIB.
 15. The GCIB processing system of claim 14, wherein said GCIBsource comprises: a nozzle assembly comprising a gas source, astagnation chamber and a nozzle, and configured to introduce under highpressure one or more gases through said nozzle to said vacuum vessel inorder to produce a gas cluster beam; a gas skimmer positioned downstreamfrom said nozzle assembly, and configured to reduce the number ofenergetic, smaller particles in said gas cluster beam; and an ionizerpositioned downstream from said gas skimmer, and configured to ionizesaid gas cluster beam to produce said GCIB.
 16. The GCIB processingsystem of claim 15, further comprising: a filter positioned downstreamfrom said ionizer, and configured to substantially reduce the number ofclusters having 100 or less atoms or molecules or both.
 17. The GCIBprocessing system of claim 16, further comprising: a beam gatepositioned downstream from said filter, and configured to open and closeexposure of said GCIB to a substrate positioned downstream.
 18. The GCIBprocessing system of claim 14, wherein said control system is configuredto adjust the tilt of said substrate holder from a first location ofsaid substrate holder relative to said GCIB to a second location of saidsubstrate holder relative to said GCIB in a continuous manner orstep-wise manner.
 19. The GCIB processing system of claim 14, furthercomprising: a beam current sensor configured to calibrate and/or profilean interaction of a tilted surface of said substrate holder with saidGCIB.